Electrostatic discharge prevention pump

A dispensing pump, comprising:

• a body comprised of an electrically conductive material and having an input port and an output port, wherein a dispense material is configured to enter an enclosure inside the body from the input port and exit the enclosure through the output port, and wherein the electrically conductive material comprises stainless steel;
• a plurality of first electrical contacts disposed on an outer surface of the body, the plurality of first electrical contacts are arranged in a row from a first edge of the body to a second edge of the body;
• one or more first connection wires coupled between each one of the one or more first electrical contacts and ground, wherein the one or more first electrical contacts are configured to conduct static electric charge generated inside the body through the one or more first connection wires to the ground;
• a dispensing nozzle connected to the body via the output port, the dispensing nozzle comprising:
• a tube comprised of the electrically conductive material;
• a plurality of second electrical contacts disposed on an outer surface of the tube at a density of 0.1 to 2 cm−2, wherein the plurality of second electrical contacts are stacked in a row from an entrance portion of the tube to a tip of the tube;
• and
• a plurality of second connection wires coupled between each one of the plurality of second electrical contacts and the ground;
• and
• a dispense controller configured to control the dispensing pump by controlling the input port of the body to increase or decrease a flow of the dispense material.

A dispensing system, comprising:

• a dispensing pump connected from a dispense material supply and comprising:
• a body comprising a plurality of first electrical contacts disposed thereon, the plurality of first electrical contacts are arranged in a row from a first edge of the body to a second edge of the body and wherein the body comprises stainless steel, and
• one or more first connection wires coupled between each of the one or more first electrical contacts and ground;
• a dispensing nozzle connected downstream from the dispensing pump and comprising:
• a tube comprising a plurality of second electrical contacts disposed on an outer surface thereof at a density of 0.1 to 2 cm−2, wherein the plurality of second electrical contacts are stacked in a row from an entrance portion of the tube to a tip of the tube, and
• a plurality of second connection wires coupled between each of the plurality of second electrical contacts and the ground;
• and
• a dispense controller configured to control the dispensing pump by controlling a valve to increase or decrease a flow of dispense material through the dispensing nozzle onto a wafer mounted on top of a wafer stage downstream from the dispensing nozzle,
• wherein the increase or decrease in the flow of the dispense material is controlled based on a number of particles counted on a surface of the wafer relative to a threshold number of particles.