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US 12,592,676 B2Granted
Resonator
AssigneeTXC Corporation
InventorsTzu-Hsiu Peng, Wei-Chen Lo, Zong-De Lin
Life of this patent
Estimating the term…
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AssigneeTXC Corporation
InventorsTzu-Hsiu Peng, Wei-Chen Lo, Zong-De Lin
Estimating the term…
A resonator including a vibration structure, a first electrode, and a second electrode is provided. The vibration structure includes a vibration region, a protrusion portion, an opening, and a frame portion. The vibration region has a first surface and a second surface opposite to the first surface. The protrusion portion surrounds the vibration region. The opening is disposed at a side of the vibration region and between the vibration region and the protrusion portion. The opening has a first side adjacent to the vibration region and a second side far away from the vibration region. The second side is opposite to the first side. A length of the first side is greater than a length of the second side. The frame portion surrounds the protrusion portion. The first electrode is disposed on the first surface. The second electrode is disposed on the second surface.
A resonator, comprising:
Dependencies are inferred from the claim text.