Hybrid high-power and broadband variable impedance modules

A hybrid variable impedance module comprising:

• at least one mechanically variable impedance element;
• at least one electrically variable impedance element;
• and
• a control module coupled to at least one of the mechanically variable impedance element or the electrically variable impedance element, wherein the control module is configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element;
• wherein the at least one electrically variable impedance element includes a plurality of switching cells, each switching cell comprising a fixed capacitor and a switch, and
• wherein the control module is further configured to operate at least one of the switches at a RF frequency with an adjustable duty cycle to modulate an impedance of the corresponding fixed capacitor.

A non-transitory computer-readable medium storing instructions, the instructions comprising:

• receiving, at a matching network, a RF signal from a RF power source, wherein the matching network includes at least one mechanically variable impedance element and at least one electrically variable impedance element;
• in response to receiving the RF signal, determining whether an impedance match is present between an input side of the matching network and a load coupled to the matching network;
• and
• if the impedance match is not present, adjusting an impedance of the matching network to achieve the impedance match by changing at least one of an impedance of the at least one mechanically variable impedance element or an impedance of the at least one electrically variable impedance element;
• wherein the at least one electrically variable impedance element includes a plurality of switching cells, each switching cell comprising a fixed capacitor and a switch,
• wherein changing the impedance of the at least one electrically variable impedance element includes operating at least one of the switches at a RF frequency with an adjustable duty cycle to modulate an impedance of the corresponding fixed capacitor.

A power supply system for powering a load, the power supply system comprising:

• a RF generator including a RF power source configured to output a RF signal;
• a matching network coupled between the RF generator and the load, wherein the matching network includes at least one mechanically variable impedance element and at least one electrically variable impedance element;
• and
• a control module coupled to the matching network and configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element to vary an impedance match between an input side of the matching network and the RF generator,
• wherein the at least one electrically variable impedance element includes one or more varactors and a plurality of capacitors coupled between the RF generator and the one or more varactors, wherein the control module is configured to adjust an impedance of the one or more varactors based on a bias voltage.

A hybrid variable impedance module comprising:

• at least one mechanically variable impedance element;
• at least one electrically variable impedance element;
• and
• a control module coupled to at least one of the mechanically variable impedance element or the electrically variable impedance element, wherein the control module is configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element,
• wherein the at least one electrically variable impedance element includes a varactor and a plurality of capacitors, wherein each of the plurality of capacitors is coupled to a respective electrode of the varactor.