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US 12,592,354 B2Granted
Modular getters and getters with different materials in vacuum enclosures
AssigneeVarex Imaging Corporation
InventorsDave Kirkham, Amber McMullin, Vance Scott Robinson, Jake Riggle
Life of this patent
Estimating the term…
Abstract
Some embodiments include an apparatus, comprising: a vacuum enclosure including an opening; a support structure disposed in the vacuum enclosure, the support structure comprising: a first portion attached to the vacuum enclosure at the opening; and a second portion extending within the vacuum enclosure; and a plurality of getters disposed on the second portion of the support structure.
Claims20
An apparatus comprising:
- a vacuum enclosure including an opening;
- a support structure disposed in the vacuum enclosure, the support structure comprising:
- a first portion attached to the vacuum enclosure at the opening;
- and
- a second portion extending within the vacuum enclosure;
- a plurality of getters disposed on the second portion of the support structure;
- a first heating element associated with a first getter of the plurality of getters;
- and
- a second heating element associated with a second getter of the plurality of getters,
- wherein the second heating element is connected in series with the first heating element or is individually electrically addressable relative to the first heating element.
7 more elements
A method comprising:
- providing a support structure including a first portion and a second portion;
- mounting a plurality of getters on the second portion of the support structure, wherein the mounting comprises:
- attaching a plurality of rigid components to the support structure such that each rigid component of the plurality of rigid components constrains a corresponding getter of the plurality of getters, each of the plurality of rigid components comprising a washer, a nut, or a protrusion rigidly attached to the support structure;
- and
- constraining at least one of the getters between a rigid component of the plurality of rigid components and a resilient component;
- inserting the support structure with the getters into an opening of a vacuum enclosure;
- and
- attaching the first portion of the support structure to the vacuum enclosure at the opening.
5 more elements
An apparatus comprising:
- a vacuum enclosure;
- a plurality of getters for capturing atoms or molecules disposed within the vacuum enclosure, the plurality of getters comprising:
- a first getter with a first heating element;
- and
- a second getter with a second heating element electrically connected to the first heating element in series;
- a support structure for supporting the plurality of getters, wherein a first portion of the support structure attaches the support structure to the vacuum enclosure.
3 more elements
Dependencies are inferred from the claim text.