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US 12,591,997 B2Granted
Arrangement device and method
AssigneeAuros Technology, Inc.
InventorsSol-Lee Hwang, Hye-Ji Im
Life of this patent
Estimating the term…
Abstract
An arrangement device includes: a detector obtaining an image in a field of view (FOV) of a wafer, and a processor digitalizing the obtained image into black and white to model an edge line, and identifying a central position of the wafer by using the modeled edge line. The processor stores three reference points placed at half of a width and half of a height of the FOV, and obtains the image at each of the three reference points.
Claims15
An arrangement device, comprising:
- a detector comprising an image sensor configured to obtain an image in a field of view (FOV) of a wafer;
- and
- a processor digitalizing the obtained image into black and white to model an edge line, and identifying a central position of the wafer by using the modeled edge line,
- wherein the processor stores three reference points placed at half of a width and half of a height of the FOV, and obtains the image at each of the three reference points, and
- wherein the processor calculates three correction points having an X value or a Y value that are the same as those of the three reference points, on the modeled edge line.
2 more elements
An arrangement method, comprising:
- obtaining an image in an FOV of a wafer;
- digitalizing the obtained image into black and white;
- modeling an edge line in the digitalized image;
- and
- identifying a central position of the wafer by using the modeled edge line,
- wherein the arrangement method further comprises storing three reference points placed at half of a width and half of a height of the FOV, and obtaining the image comprises obtaining an image at each of the three reference points,
- wherein identifying a central position comprises calculating three correction points having an X value or a Y value that are the same as those of the three reference points, on the modeled edge line.
4 more elements
Dependencies are inferred from the claim text.