Sensor positioning method, a positioning system, a lithographic apparatus, a metrology apparatus, and a device manufacturing method
AssigneeASML Netherlands B.V.
InventorsJeroen Johan Maarten Van De Wijdeven, Michaël Johannes Christiaan Ronde, Bram Antonius Gerardus Lomans, Bastiaan Lambertus Wilhelmus Marinus Van De Ven
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Abstract
The invention provides a method for positioning a sensor over a target on a moveable object, comprising the following steps: a. moving the object to move the target to a desired position, b. moving the sensor in a direction towards a measured momentary position of the target, c. when the sensor is over the target. moving the sensor along with the target to the desired position of the target.
Claims18
A method for positioning a sensor over a target on a moveable object, comprising:
- moving the object to move the target to a desired position;
- and
- moving the sensor in a direction towards a measured momentary position of the target and to a desired waiting position determined by the measured momentary position of the target and an available moving range of the sensor;
- wherein when the sensor is over the target, moving the sensor along with the target to the desired position of the target.
A positioning system for positioning a sensor over a target on a moveable object, comprising:
- an object actuation system configured to move and position the moveable object;
- a sensor actuation system configured to move and position the sensor;
- an object measurement system configured to measure a momentary position of the moveable object;
- a sensor measurement system configured to measure a momentary position of the sensor;
- and
- a control unit configured to:
- drive the object actuation system based on an output of the object measurement system and a desired momentary position of the target on the object,
- drive the sensor actuation system based on an output of the sensor measurement system and a desired momentary position of the sensor,
- drive the object measurement system to move the target to a desired position, and
- drive the sensor actuation system to move the sensor in a direction towards the measurement momentary position of the target and to a desired waiting position determined by the measured momentary position of the target and an available moving range of the sensor, and
- wherein when the sensor is over the target, the control unit is configured to drive the sensor actuation system to move the sensor along with the target to the desired position of the target.
Dependencies are inferred from the claim text.