Method for obtaining training data for training a model of a semiconductor manufacturing process

A computer program product comprising a non-transitory computer-readable medium comprising program instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:

• obtain behavioral property data for a physical manufacturing process for manufacturing an integrated circuit, the behavioral property data describing a relation between (a) one or more values of a process parameter before execution or occurrence of a variation of the physical manufacturing process and/or variation of a related tool or effect of the physical manufacturing process and (b) one or more values of the same process parameter after the execution or occurrence of the variation of the physical manufacturing process and/or variation of the related tool or effect;
• generate, from the behavioral property data, values of synthetic metrology data describing an effect of variations in the physical manufacturing process and/or the related tool or effect, on the process parameter;
• train a model relating to the physical manufacturing process using a training data set including the synthetic metrology data;
• and
• provide a signal based on an output of the trained model to a tool or system for use by the tool or system in configuration of the physical manufacturing process.