Methods and apparatuses for spatially filtering optical pulses
AssigneesASML Netherlands B.V., ASML Holding N.V.
InventorsAli Alsaqqa, Patrick Sebastian Uebel, Paulus Antonius Andreas Teunissen
Life of this patent
Estimating the term…
Abstract
An optical filter apparatus including an optical divergence device, operable to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses; and a spatial filter, located at the optical plane, operable to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
Claims20
An optical filter apparatus, comprising:
- an optical divergence device, configured to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses;
- and
- a spatial filter, located at the optical plane, configured to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
A method of spatial filtering optical pulses, the method comprising:
- spatially distributing a plurality of optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses;
- and
- spatially filtering the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
Dependencies are inferred from the claim text.