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US 12,591,130 B2Granted
Combination of DLC and PFPE for EWOD actuation
AssigneeSeagate Technology LLC
InventorsXiong Liu, Barish Chakravarty, Lihong Zhang, Akhil Namboori, Hui Ning Tan
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Abstract
A digital microfluidic (DMF) system based on an electrowetting-on-dielectric mechanism includes a substrate, and at least one dielectric layer comprising diamond-like carbon over the substrate. The DMF system also includes a plurality of electrodes connected to the dielectric layer. A voltage source is selectively couplable to different electrodes of the plurality of electrodes.
Claims19
A digital microfluidic (DMF) system based on an electrowetting-on-dielectric mechanism, the DMF system comprising:
- a substrate;
- at least one dielectric layer comprising diamond-like carbon (DLC) over the substrate with at least a portion of the DLC comprising nitrogenated DLC;
- a plurality of electrodes connected to the dielectric layer;
- and
- a voltage source selectively couplable to different electrodes of the plurality of electrodes.
2 more elements
A method comprising:
- forming a substrate;
- forming at least one dielectric layer comprising diamond-like carbon (DLC) over the substrate with at least a portion of the DLC comprising nitrogenated DLC;
- connecting a plurality of electrodes to the dielectric layer;
- and
- providing a voltage source that is selectively couplable to different electrodes of the plurality of electrodes.
2 more elements
A system comprising:
- a substrate;
- at least one dielectric layer comprising diamond-like carbon (DLC) over the substrate with at least a portion of the DLC comprising nitrogenated DLC;
- a hydrophobic layer comprising perfluoropolyether with a hydroxyl group over the at least one dielectric layer;
- a plurality of electrodes connected to the dielectric layer;
- and
- a voltage source selectively couplable to different electrodes of the plurality of electrodes.
3 more elements
Dependencies are inferred from the claim text.