Semiconductor testing apparatus and method of manufacturing semiconductor device
AssigneeMitsubishi Electric Corporation
InventorsNoritsugu Nomura, Takuya Yoshimura
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Abstract
Occurrence of partial discharge is reduce and the test of electrical properties of a semiconductor device is and stably performed. A semiconductor testing apparatus includes a stage, a probe, a separation section, and a gas supply section. The probe performs electrical input and output to and from the semiconductor device held on the stage. The separation section separates the space above the semiconductor device held on the stage into the pressurized space and the probe space including the probe. The gas supply section supplies gas to the pressurized space to pressurize the pressurized space.
Claims11
A semiconductor testing apparatus configured to evaluate electrical properties of a semiconductor device, comprising:
- a stage;
- a probe that performs electrical input and output to and from the semiconductor device held on the stage;
- a separation section capable of separating a space above the semiconductor device held on the stage into a pressurized space and a probe space including the probe, such that a portion of the semiconductor device is positioned within the pressurized space and a portion of the semiconductor device is positioned within the probe space, and the pressure in the pressurized space is higher than the pressure in the probe space;
- and
- a gas supply section that supplies gas to the pressurized space to pressurize the pressurized space.
A method of manufacturing a semiconductor device, the semiconductor device being manufactured using a semiconductor testing apparatus configured to evaluate electrical properties of a semiconductor device, the semiconductor testing apparatus comprising:
- a stage;
- a probe that performs electrical input and output to and from the semiconductor device held on the stage;
- a separation section capable of separating a space above the semiconductor device held on the stage into a pressurized space and a probe space including the probe;
- and
- a gas supply section that supplies gas to the pressurized space to pressurize the pressurized space,
- the method comprising the steps of:
- holding the semiconductor device on the stage;
- separating, by the separation section, a space above the semiconductor device held on the stage into the pressurized space and the probe space;
- pressurizing, by the gas supply section supplying gas to the pressurized space, the pressurized space;
- and
- after the steps, performing electrical input and output through the probe to and from the semiconductor device held on the stage while in the step of performing electrical input and output to and from the semiconductor device, the pressure in the pressurized space is higher than the pressure in the probe space.
Dependencies are inferred from the claim text.