Surface acoustic wave sensor device
AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche, Julien Garcia, Emilie Courjon
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Abstract
An acoustic wave sensor device comprises a first interdigitated transducer, a first reflection structure, a second reflection structure, a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure, and a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure. At least one of the first and second upper surfaces is covered at least partly by a metalization layer or a passivation layer. The present invention relates also to an acoustic wave sensor assembly.
Claims22
An acoustic wave sensor device, comprising:
- a first interdigitated transducer;
- a first reflection structure;
- a second reflection structure;
- a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure;
- and
- a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure, wherein the second resonance cavity is formed between the first reflection structure and the second reflection structure and the first reflection structure separates the first resonance cavity from the second resonance cavity;
- and wherein at least one of the first and second upper surfaces is covered at least partly by a metalization layer or a passivation layer.
An acoustic wave sensor device, comprising:
- a first interdigitated transducer;
- a first reflection structure;
- a second reflection structure;
- a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure;
- a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure, wherein the second resonance cavity is formed between the first reflection structure and the second reflection structure and the first reflection structure separates the first resonance cavity from the second resonance cavity;
- and
- wherein the first and second resonance cavity differ from each other in that one of them exhibits some physical and/or chemical modifications as compared to the other one.
Dependencies are inferred from the claim text.