Radio frequency bio sensor and manufacturing method thereof

An apparatus, comprising:

• a radio frequency (RF) bio-sensor for detecting DNA, the RF bio-sensor comprising:
• a substrate;
• a signal detection electrode disposed on the substrate and configured to generate an electric field under a voltage applied thereto;
• and
• an interconnector thin film disposed on the signal detection electrode and configured to transmit information on the DNA as a detection target to the signal detection electrode;
• and
• a RF analysis device coupled to the RF bio-sensor and configured to:
• determine a first scattering parameter (S-parameter) and a second S-parameter based on an input voltage and an output voltage of the signal detection electrode;
• and
• determine a concentration of the DNA as the detection target based on the first S-parameter and the second S-parameter.