Back to results
US 12,590,918 B2Granted
Capacitive gas sensor and method for manufacturing same
AssigneeIndustry-University Cooperation Foundation Hanyang University Erica Campus
InventorsYong Ho Choa, Ji Young Park, Min Seob Lim, Hong Baek Cho, Han Seung Lee
Life of this patent
Estimating the term…
Abstract
Provided is a capacitive gas sensor. The capacitive gas sensor comprises a sensitive material for adsorbing and desorbing a target gas, an upper electrode surrounding the sensitive material, a lower electrode facing the upper electrode, and a porous structure disposed between the upper electrode and the lower electrode, wherein the capacitance of the sensitive material changes as the sensitive material adsorbs and desorbs the target gas.
Claims8
A capacitive gas sensor comprising:
- a sensitive material for adsorbing or desorbing a target gas;
- an upper electrode surrounding the sensitive material;
- a lower electrode facing the upper electrode;
- and
- a porous structure disposed between the upper electrode and the lower electrode,
- wherein a capacitance of the capacitive gas sensor changes as the sensitive material adsorbs or desorbs the target gas,
- wherein the upper electrode has a ring shape with a hollow formed at a central portion thereof,
- wherein the lower electrode has a circle plate shape,
- wherein the sensitive material is disposed in the hollow formed at the central portion of the upper electrode, and
- wherein the porous structure includes anodic aluminum oxide (AAO).
7 more elements
Dependencies are inferred from the claim text.