Laboratory crystallographic x-ray diffraction analysis system
AssigneesCarl Zeiss X-ray Microscopy, Inc., Xnovo Technology ApS
InventorsChristian Holzner, Erik Mejdal Lauridsen, Peter Reischig
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Abstract
A method and system for three dimensional crystallographic grain orientation mapping for objects. In different examples, subbeams are used that interact with the object at different angles. Other options include rocking the object at different angles during a raster scan. Multiple scans can be performed including raster scanning and directed analysis. In addition, different apertures can be employed. In examples, a dispersive spectroscopy (EDS) detector is added to analysis the energy of the diffracted photons.
Claims19
A method for crystallographic grain analysis, the method comprising:
- performing a scan of objects with an x-ray beam to identify possible anomalies, wherein performing the scan comprises receiving, by a detector, x-ray diffraction patterns formed by diffraction of x-rays by crystallographic structures in the objects;
- and then later
- performing more detailed analyses of the anomalies with a smaller beam aperture relative to a beam aperture used in the scan,
- wherein identifying the anomalies comprises comparing detected diffraction patterns to expected diffraction patterns.
Dependencies are inferred from the claim text.