Inspection system and inspection method
AssigneesNuctech Company Limited, Tsinghua University
InventorsLi Zhang, Zhiqiang Chen, Qingping Huang, Hui Ding, Yong Zhou, Xin Jin, Liming Yao
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AssigneesNuctech Company Limited, Tsinghua University
InventorsLi Zhang, Zhiqiang Chen, Qingping Huang, Hui Ding, Yong Zhou, Xin Jin, Liming Yao
Estimating the term…
An inspection system, including: a carrying device; at least one ray source and a detector assembly. When the at least one ray source is located at one of scanning positions relative to the carrying device, the at least one ray source and the detector assembly are lifted or lowered along the rotation axis relative to the carrying device and the at least one ray source emits X-rays. After the at least one ray source and the detector assembly are lifted or lowered a predetermined distance relative to the carrying device, the at least one ray source rotates around the rotation axis relative to the carrying device to another one of scanning positions. The inspection system further reconstructs a three-dimensional scanning image of the object to be inspected based on detection data of the detector assembly.
An inspection system, comprising:
An inspection method, comprising:
Dependencies are inferred from the claim text.