X-ray inspection apparatus and sensitivity correction method for x-ray inspection apparatus

An X-ray inspection apparatus comprising:

• a conveying unit configured to convey an article;
• an X-ray source configured to irradiate the article conveyed by the conveying unit with X-rays;
• an X-ray detection unit capable of detecting the X-rays by photon counting, the X-ray detection unit being a direct conversion type detection unit;
• and
• an inspection unit configured to inspect the article based on an output result of the X-ray detection unit,
• wherein, in a sensitivity correction of the X-ray detection unit performed when the X-ray inspection apparatus is activated,
• after a lapse of a predetermined period from a start of detection of X-rays, the X-ray detection unit is configured to detect X-rays not transmitting the article and serving as a reference for the sensitivity correction, and
• the X-ray source is configured to start X-ray irradiation during the predetermined period,
• wherein the predetermined period is equal to or longer than a period in which irradiation of the X-ray source is stabilized, and
• wherein the sensitivity correction of the X-ray detection unit corresponds to correction of an output difference between each sensor included in the X-ray detection unit.