X-ray inspection apparatus

An X-ray inspection apparatus, comprising:

• a transportation unit that transports an object to be inspected so that the object to be inspected passes a predetermined inspection area;
• an X-ray generation source that irradiates an X-ray to the inspection area;
• an X-ray detection unit that receives the X-ray that has passed the inspection area with a plurality of sensor elements lined up in a direction orthogonal to a transportation direction of the object to be inspected;
• an image data generation unit that generates an image data of the object to be inspected from an output of the X-ray detection unit;
• a good or not determination unit that performs quality inspection of the object to be inspected based on the image data generated by the image data generation unit and a predetermined determination criterion;
• and
• a control unit that controls the quality inspection of the object to be inspected, wherein:
• the control unit is configured to be switchable between an inspection mode in which the quality inspection of the object to be inspected is performed and a calibration mode in which calibration data to calibrate variations of the sensor elements, necessary for brightness of an image of the image data generated by the image data generation unit becomes uniform in the direction in which the sensor elements are lined up, is generated in a state where there is no object to be inspected in the inspection area,
• the control unit includes a calibration data calculation unit that calculates the calibration data based on an image data generated by the image data generation unit before and after placing a calibration member in the inspection area in the calibration mode, and a correction unit that corrects the image data obtained when the object to be inspected passes the inspection area based on the calibration data in the inspection mode, and
• a calibration member detection unit that detects that the calibration member has been transported to the inspection area in the inspection mode, wherein when the calibration member detection unit detects that the calibration member has been transported by determining whether or not the brightness of the image data has changed as a whole, switching to the calibration mode is performed.