# US 12,590,903 B2 · Inspection device and inspection method with infrared light for scratch detection on inspection target > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,590,903 B2 - Document ID: US12590903B2 - Status: Granted - Kind: B2 - Application number: 18/272,722 - Filed: 2022-01-31 - Published: 2025-03-06 - Granted: 2026-03-31 - Earliest claimed: 2021-02-01 - Assignees: Mitsubishi Heavy Industries, Ltd. - Applicants: Mitsubishi Heavy Industries, Ltd. - Inventors: Yuki Yano; Nobuyuki Kamihara; Takayuki Moritake; Kohei Kawazoe; Kiwamu Nakajima; Toshinobu Muraki; Yusuke Hashida; Kanata Fujii - Web page: https://patentgrep.com/patent/US12590903B2 ## CPC - G01N 21/3563: for analysing solids; Preparation of samples therefor - G01N 21/8851: {Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002)} - G01N 21/8422: {Investigating thin films, e.g. matrix isolation method} - G01N 21/8806: {Specially adapted optical and illumination features} - G01N 21/958: Inspecting transparent materials {or objects, e.g. windscreens (for conveyed flat sheet or rod G01N21/896)} - G01N 2021/8427: {Coatings} - G01N 2021/8848: {Polarisation of light} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract An inspection device includes an infrared acquisition unit for acquiring infrared light detected by an infrared camera for detecting infrared light from an inspection target that includes an electroconductive member, an intensity-determining unit for determining a detection intensity of the infrared light, and a scratch-determining unit for determining whether or not there is a scratch on the electroconductive member based on the detection intensity of the infrared light. ## Claims ### Claim 1 An inspection device comprising: an infrared acquisition unit configured to acquire an intensity of infrared light detected by an infrared camera configured to detect the infrared light from an inspection target including a conductive member; an intensity determination unit configured to determine a detection intensity of the infrared light; and a scratch determination unit configured to determine a presence or an absence of a scratch on the conductive member based on the detection intensity of the infrared light; wherein: a wavelength of the infrared light is a wavelength that passes through the inspection target and a top coat on the inspection target, but does not pass through the conductive member; and the infrared acquisition unit is configured to change a detection sensitivity of the infrared camera according to a distance between the inspection target and the infrared camera. ### Claim 2 (depends on 1) The inspection device according to claim 1, wherein the scratch determination unit is configured to determine a degree of the scratch on the conductive member based on the detection intensity of the infrared light and a reference value for determining the presence or the absence of the scratch on the inspection target. ### Claim 3 (depends on 1) The inspection device according to claim 1, further comprising: an infrared light source configured to face the infrared camera with the inspection target interposed between the infrared camera and the infrared light source, wherein the infrared camera is configured to detect the infrared light with which a first surface of the inspection target is irradiated by the infrared light source and which transmits through a second surface of the inspection target. ### Claim 4 (depends on 1) The inspection device according to claim 1, further comprising: a heating device configured to face the infrared camera with the inspection target interposed between the infrared camera and the heating device, wherein the infrared camera is configured to detect and the infrared light emitted by the inspection target and heated by the heating device. ### Claim 5 (depends on 1) The inspection device according to claim 1, further comprising: an infrared light source and a mirror configured to face the infrared camera with the inspection target between the infrared camera and both the infrared light source and the mirror, wherein the infrared camera is configured to detect the infrared light with which the mirror is irradiated by the infrared light source, which is reflected to a first surface of the inspection target by the mirror, and which transmits through a second surface of the inspection target. ### Claim 6 (depends on 3) The inspection device according to claim 3, wherein the scratch determination unit is configured to determine that: there is no scratch on the conductive member when the infrared light is not detected; and there is the scratch on the conductive member when the infrared light is detected. ### Claim 7 (depends on 6) The inspection device according to claim 6, wherein the scratch determination unit is configured to determine that there is no scratch on the conductive member when the detection intensity of the infrared light is zero or equal to or less than a threshold value. ### Claim 8 (depends on 1) The inspection device according to claim 1, further comprising: an infrared light source configured to be on as same side as the infrared camera with respect to the inspection target, wherein the infrared camera is configured to detect the infrared light with which one surface of the inspection target is irradiated by the infrared light source and which is reflected by the one surface of the inspection target. ### Claim 9 (depends on 1) The inspection device according to claim 1, further comprising: an infrared light source and a mirror are configured to be on a same side as the infrared camera with respect to the inspection target, wherein the infrared camera is configured to detect the infrared light with which the mirror is irradiated by the infrared light source, which is reflected to one surface of the inspection target by the mirror, and which is reflected by the one surface of the inspection target. ### Claim 10 (depends on 8) The inspection device according to claim 8, wherein the scratch determination unit is configured to determine that: there is the scratch on the conductive member when the infrared light is not detected; and there is no scratch on the conductive member when the infrared light is detected. ### Claim 11 (depends on 10) The inspection device according to claim 10, wherein the scratch determination unit is configured to determine that there is the scratch on the conductive member when the detection intensity of the infrared light is zero or equal to or less than a threshold value. ### Claim 12 (depends on 1) The inspection device according to claim 1, further comprising: an infrared light source which is integral with the infrared camera and configured to be on a same side as the infrared camera with respect to the inspection target, wherein: the infrared light source is at a position where the infrared light source is configured to surface-irradiate the inspection target with the infrared light at an angle; and the infrared camera is at a position where an optical axis of the infrared light radiated from the infrared light source and reflected by the inspection target coincides with an optical axis of a lens of the infrared camera. ### Claim 13 (depends on 12) The inspection device according to claim 12, wherein: the infrared light source includes a point light source and a parabolic mirror; and the parabolic mirror is configured to reflect the infrared light radiated by the point light source, and surface-irradiate the inspection target with the infrared light. ### Claim 14 (depends on 12) The inspection device according to claim 12, wherein: the infrared light source includes a point light source and an off-axis parabolic mirror; and the off-axis parabolic mirror is configured to reflect the infrared light radiated by the point light source, and surface-irradiate the inspection target with the infrared light. ### Claim 15 (depends on 12) The inspection device according to claim 12, wherein at least one of the infrared camera or the infrared light source includes a filter configured to selectively transmit the infrared light. ### Claim 16 (depends on 15) The inspection device according to claim 15, wherein the filter is a wavelength-selective filter. ### Claim 17 (depends on 15) The inspection device according to claim 15, wherein the filter is a polarizing filter. ### Claim 18 (depends on 17) The inspection device according to claim 17, further comprising: a rotation mechanism configured to rotate a polarizing surface of the polarizing filter. ### Claim 19 (depends on 12) The inspection device according to claim 12, wherein: the infrared camera is a first infrared camera, the infrared light is first infrared light, and the position of the first infrared camera is a first position; the inspection device further comprises a second infrared camera at a second position different from the first position; the infrared acquisition unit is configured to acquire an intensity of second infrared light detected by the second infrared camera; the intensity determination unit is configured to determine a detection intensity of the second infrared light, and the scratch determination unit is configured to determine the presence or the absence of the scratch on the conductive member based on the detection intensity of the first infrared light and the detection intensity of the second infrared light. ### Claim 20 (depends on 12) The inspection device according to claim 12, further comprising: a movement mechanism configured to move the infrared camera between a first position and a second position different from the first position, wherein: the infrared camera is configured to detect first infrared light from the inspection target at the first position, and second infrared light from the inspection target at the second position; the infrared acquisition unit is configured to acquire the first infrared light and the second infrared light; the intensity determination unit is configured to determine the detection intensity of the first infrared light and the detection intensity of the second infrared light; and the scratch determination unit is configured to determine the presence or the absence of the scratch on the conductive member based on the detection intensity of the first infrared light and the detection intensity of the second infrared light. ### Claim 21 An inspection method comprising: acquiring an intensity of infrared light detected by an infrared camera that detects the infrared light from an inspection target including a conductive member; determining a detection intensity of the infrared light; determining a presence or an absence of a scratch on the conductive member based on the detection intensity of the infrared light; and changing a detection sensitivity of the infrared camera according to a distance between the inspection target and the infrared camera, wherein a wavelength of the infrared light is a wavelength that passes through the inspection target and a top coat on the inspection target, but does not pass through the conductive member. ### Claim 22 (depends on 4) The inspection device according to claim 4, wherein the scratch determination unit is configured to determine that: there is no scratch on the conductive member when the infrared light is not detected; and there is the scratch on the conductive member when the infrared light is detected. ### Claim 23 (depends on 5) The inspection device according to claim 5, wherein the scratch determination unit is configured to determine that: there is no scratch on the conductive member when the infrared light is not detected; and there is the scratch on the conductive member when the infrared light is detected. ### Claim 24 (depends on 9) The inspection device according to claim 9, wherein the scratch determination unit is configured to determine that: there is no scratch on the conductive member when the infrared light is detected; and there is the scratch on the conductive member when the infrared light is not detected.