Strain sensor, functional film, and method for manufacturing same
AssigneeNitto Denko Corporation
InventorsSatoshi Yasui, Katsunori Shibuya, Kazuhiro Nakajima
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Abstract
A functional film includes a strain resistance film provided on one principal surface of a flexible insulating base. The strain resistance film is a chromium nitride thin-film having a thickness of 150 nm or less. In an X-ray diffraction chart with a CuKα ray as an X-ray source, the strain resistance film has an intensity ratio I2/I1 of 0.001 or more, where the intensity ratio I2/I1 is a ratio of the intensity I2 of the second peak in a range in which 2θ is 60° to 65° to the intensity I1 of the first peak in a range in which 2θ is 43° to 45°. The strain resistance film is less liable to crack due to bending, and has a high gauge factor. The functional film is suitably used for a strain sensor.
Claims10
A functional film that is used for producing a strain sensor, the functional film comprising:
- a flexible insulating base;
- and a strain resistance film arranged on one principal surface of the flexible film base, wherein
- the strain resistance film is a chromium nitride thin-film having a thickness of 150 nm or less, and
- in an X-ray diffraction chart with a CuKα ray as an X-ray source, the strain resistance film has an intensity ratio I2/I1 of 0.001 or more, where the intensity ratio I2/I1 is a ratio of an intensity I2 of a second peak in a 2θ range of 60° to 65° to an intensity I1 of a first peak in a 2θ range of 43° to 45°.
A strain sensor film comprising:
- a flexible insulating base;
- and a patterned sensor wiring arranged on one principal surface of the flexible film base, wherein
- the sensor wiring is a chromium nitride thin-film having a thickness of 150 nm or less, and
- in an X-ray diffraction chart with a CuKα ray as an X-ray source, the sensor wiring has an intensity ratio I2/I1 of 0.001 or more, where the intensity ratio I2/I1 is a ratio of an intensity I2 of a second peak in a 2θ range of 60° to 65° to an intensity I1 of a first peak in a 2θ range of 43° to 45°.
Dependencies are inferred from the claim text.