Ultrathin micro-spectrometer and method of manufacturing the same
AssigneeKorea Advanced Institute of Science and Technology
InventorsKi Hun Jeong, Jung Woo Park, Jae Hun Jeon, Gi Beom Kim
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AssigneeKorea Advanced Institute of Science and Technology
InventorsKi Hun Jeong, Jung Woo Park, Jae Hun Jeon, Gi Beom Kim
Estimating the term…
The disclosure relates to an ultrathin micro-spectrometer and a method of manufacturing the same, and more particularly, relates to an ultrathin micro-spectrometer including: a lens portion including: a convex lens; and a back-reflection grating layer which is formed on a rear surface of the convex lens and on the same surface of which a reflective diffraction grating and a first planar reflector are arranged; a substrate layer which is disposed to be spaced apart from the lens portion and on which a light incidence microslit is formed; a second planar reflector which is formed on the substrate layer; and a complementary metal-oxide-semiconductor (CMOS) sensor on which light reflected by the lens portion is focused, and a method of manufacturing the same.
An ultrathin micro-spectrometer comprising:
Dependencies are inferred from the claim text.