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US 12,590,383 B2Granted
Synthetic crucibles with rim coating
AssigneeGlobalWafers Co., Ltd.
InventorsJaeWoo Ryu, Carissima Marie Hudson, TaeWon Yuk, JunHwan Ji
Life of this patent
Estimating the term…
Abstract
Synesthetic quartz crucibles for holding a silicon melt during growth of single crystal silicon ingots are disclosed. The crucibles may include a coating disposed on the inner and outer surface of the crucible body along the rim. The coating extends only partially down the sidewall of the crucible and may extend to or beyond the melt line of the crucible.
Claims18
A crucible for holding a silicon melt, the crucible comprising:
- a body having a floor and a sidewall extending up from the floor, the floor and sidewall defining a cavity for holding the silicon melt, the sidewall having a top, an inner surface and an outer surface, the sidewall having a height that extends from the floor to the top of the sidewall, the body comprising a natural quartz shell and a synthetic quartz liner disposed on an inner surface of the shell;
- an inner surface coating disposed on a first inner surface area of the inner surface of the sidewall, the inner surface coating comprising magnesium, calcium, strontium or barium, the first inner surface area extending only from the top of the sidewall to a distance D1 from the top of the sidewall, wherein the distance D1 is less than the height of the sidewall, wherein the inner surface coating extends at least 10 mm below a melt line;
- and
- an outer surface coating disposed on a first outer surface area of the outer surface of the sidewall, the outer surface coating comprising magnesium, calcium, strontium or barium, the first outer surface area extending only from the top of the sidewall to a distance D2 from the top of the sidewall, wherein the distance D2 is less than the height of the sidewall, the inner surface coating and the outer surface coating having the same composition.
1 more element
A crucible for holding a silicon melt, the crucible comprising:
- a body having a floor and a sidewall extending up from the floor, the floor and sidewall defining a cavity for holding the silicon melt, the sidewall having a top, an inner surface and an outer surface, the sidewall having a height that extends from the floor to the top of the sidewall, the body comprising a natural quartz shell and a synthetic quartz liner disposed on an inner surface of the shell;
- an inner surface coating disposed on a first inner surface area of the inner surface of the sidewall, the inner surface coating comprising magnesium, calcium, strontium or barium, the first inner surface area extending only from the top of the sidewall to a distance D1 from the top of the sidewall, wherein the distance D1 is less than the height of the sidewall, wherein the inner surface coating extends at least 50 mm below a melt line;
- and
- an outer surface coating disposed on a first outer surface area of the outer surface of the sidewall, the outer surface coating comprising magnesium, calcium, strontium or barium, the first outer surface area extending only from the top of the sidewall to a distance D2 from the top of the sidewall, wherein the distance D2 is less than the height of the sidewall, the inner surface coating and the outer surface coating having the same composition.
1 more element
Dependencies are inferred from the claim text.