Methods of forming a temperature-stable, low-dielectric constant material with an ultra-low loss tangent
AssigneeSkyworks Solutions, Inc.
InventorsMichael David Hill, Srinivas Polisetty
Life of this patent
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Abstract
Disclosed herein are embodiments of high Q, temperature stable materials with low dielectric constants. In particular, a two-phase material can form based on the rutile phase of titanium oxide along with a spinel structure of ZnAl2O4. This material can have a dielectric constant below 15 which is simultaneously temperature stable.
Claims19
A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
- mixing together a ZnO powder, a Al2O3 powder, and a TiO2 powder to form a mixed powder;
- calcining the mixed powder;
- forming the calcined mixed powder into a radiofrequency component;
- and
- sintering the radiofrequency component, the radiofrequency component having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the radiofrequency component having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the at least one spinel having a composition of Zn1+xAl2−2xTixO4, and 0<x<1.
A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
- mixing together a ZnO powder, a Al2O3 powder, and a TiO2 powder to form a mixed powder;
- calcining the mixed powder;
- forming the calcined mixed powder into a radiofrequency component;
- and
- sintering the radiofrequency component, the radiofrequency component having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the radiofrequency component having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the first phase and the second phase formed out of a ZnO—Al2O3—TiO2 ternary system including about 0.3 to about 0.4 mole fraction ZnO.
A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
- mixing together a ZnO powder, a Al2O3 powder, and a TiO2 powder to form a mixed powder;
- calcining the mixed powder;
- and
- sintering the calcined mixed powder, the sintered calcined mixed powder including a temperature-stable, low-dielectric constant material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, and having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the first phase and the second phase formed out of a ZnO—Al2O3—TiO2 ternary system including about 0.01 to about 0.5 mole fraction TiO2.
Dependencies are inferred from the claim text.