Locking mechanisms for precision offset/deployment of MEMS structures
AssigneeOmnitron Sensors Inc.
InventorTrent Huang
Life of this patent
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Abstract
A system and method for precisely positioning a moveable structure in a micro-electromechanical system (MEMS). The system includes a substrate and a moveable device structure supported on the substrate. The device structure is moveable from an initial position to a deployment position at a predetermined offset angle to the substrate. A moveable anchor structure is supported on the substrate in proximity to the device structure. The anchor structure is locked to the device structure when the device structure is moved to the deployment position.
Claims18
A micro-electromechanical system (MEMS) comprising:
- a substrate;
- a moveable device structure supported on the substrate, the device structure including a slot and the device structure moveable from an initial position to a deployment position at a predetermined offset angle to the substrate;
- and
- a moveable anchor structure having a side facing the device structure with an extended tab, the moveable anchor structure supported on the substrate in proximity to the device structure, wherein the moveable anchor structure is separated from the moveable device structure in the initial position, and wherein when the moveable device structure is moved to the deployment position, the moveable device structure contacts the moveable anchor structure and the extended tab of the anchor structure is locked to the slot of the device structure when the device structure is moved to the deployment position.
A method of fixing a moveable structure at a predetermined angle in a micro-electromechanical system (MEMS), the method comprising:
- forming a moveable device structure torsionally supported on a substrate in an initial position, wherein a slot is formed in the moveable device;
- forming a moveable anchor structure having a side facing the device structure with an extended tab, the moveable anchor structure supported by the substrate in proximity to the device structure, wherein the moveable anchor structure is separated from the device structure in the initial position;
- moving the device structure from an initial position to a deployment position at a predetermined offset angle to the substrate to contact the moveable anchor structure;
- and
- locking the extended tab of the anchor structure to the slot of the device structure when the device structure is moved to the deployment position.
Dependencies are inferred from the claim text.