Platen rotation device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBruce Cho, Chia-Ying Tien, Huang-Chu Ko
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Abstract
A method includes controlling a rotational kinetic energy of a rotor assembly of a wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The method further includes generating an electrical energy output of the wafer-platen based on decreased rotational kinetic energy of the wafer-platen. The method further includes storing the electrical energy output by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.
Claims20
A method, comprising:
- controlling a rotational kinetic energy of a rotor assembly of a wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased;
- generating an electrical energy output of the wafer-platen based on decreased rotational kinetic energy of the wafer-platen;
- and
- storing the electrical energy output by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.
A system comprising:
- a platen;
- a rotor assembly configured to rotate the platen;
- a converter connected to the rotor assembly, wherein the converter is configured to adjust a rotational kinetic energy of the rotor assembly;
- and
- an energy storage device configured to store electrical energy in response to a decrease in the rotational kinetic energy of the rotor assembly.
A chemical mechanical planarization (CMP) device comprising:
- a platen for receiving a wafer;
- a rotor assembly configured to rotate the platen;
- a controller configured to receive a status signal from the rotor assembly, wherein the controller is configured to generate a control signal based on the status signal;
- a converter configured to receive the control signal, wherein the converter is configured to control a rotational kinetic energy of the rotor assembly based on the control signal, and the converter is configured to convert energy of a first waveform form from the rotor assembly into a second waveform;
- and
- an energy storage device configured to store energy of the second waveform received from the converter.
Dependencies are inferred from the claim text.