Pusher, transfer device, and substrate processing apparatus
AssigneeEbara Corporation
InventorsKuniaki Yamaguchi, Kentaro Asano, Dai Yoshinari
Life of this patent
Estimating the term…
Abstract
A pusher that holds a substrate includes: a pusher body, and a plurality of seating members that is attached to the pusher body and on which a substrate is seated. Each of the plurality of seating members includes: a pedestal member including a seating portion on which the substrate is seated and a magnet disposed at a position different from the seating portion, and supported by the pusher body such that the position of the magnet is moved according to seating or leaving of the substrate; a seating sensor configured to detect movement of the magnet; and a magnetic member disposed to shield a portion between a movable region of the magnet and the seating sensor.
Claims12
A pusher that holds a substrate, the pusher comprising:
- a pusher body;
- and
- a plurality of seating supports that is attached to the pusher body and on which a substrate is seated,
- wherein each of the plurality of seating supports includes:
- a pedestal including a seating portion on which the substrate is seated, and a magnet disposed at a position different from the seating portion and supported by the pusher body such that the magnet is moved according to seating or retreating of the substrate;
- a seating sensor configured to detect movement of the magnet;
- and
- a magnetic shield plate disposed to shield a portion between a movable region of the magnet and the seating sensor.
Dependencies are inferred from the claim text.