Filter isolation for reduced startup time in low relative humidity equipment front end module

A system, comprising:

• an equipment front end module (EFEM), comprising:
• an EFEM chamber formed between a plurality of walls of the EFEM;
• an upper plenum above the EFEM chamber, the upper plenum in fluid communication with the EFEM chamber;
• a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum;
• and
• one or more filters that separate the upper plenum from the EFEM chamber;
• and
• a plurality of isolation components configured to entirely removably attach to the EFEM, wherein, while attached to the EFEM, the plurality of isolation components isolate at least the one or more filters from an external ambient environment outside of the EFEM when the EFEM is opened to the external ambient environment, and wherein a first isolation component of the plurality of isolation components is disposed within the upper plenum and sealed against a bottom surface of the upper plenum,
• wherein the plurality of isolation components each comprises a gas inlet which can be configured to receive a purge gas.