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US 12,589,174 B2Granted
Sterilant storage device and sterilization device
AssigneePlasmapp Co., Ltd.
InventorsYoubong Lim, Junyoung Kim, Jeongsan Seo
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Abstract
A sterilant storage device according to an embodiment of the present disclosure includes a first container storing a sterilant therein and including at least a part having air-permeability, and a second container surrounding the first container and formed to be entirely air-impermeable to maintain an internal airtight condition.
Claims16
A sterilant storage device comprising:
- a first container storing a sterilant therein and including at least a part having air-permeability;
- and
- a second container surrounding the first container and being formed of an air-permeable material in part and an air-impermeable material in a remaining part.
A sterilization device comprising:
- a sterilant storage device storing a sterilant;
- a sterilant extractor configured to extract the sterilant from the sterilant storage device;
- and
- a vaporizer configured to vaporize the extracted sterilant and supply the vaporized sterilant to an area in which an object to be processed is located,
- wherein the sterilant storage device includes:
- a first container storing the sterilant therein and including at least a part having air-permeability;
- and
- a second container surrounding the first container and being formed of an air-permeable material in part and an air-impermeable material in a remaining part.
5 more elements
Dependencies are inferred from the claim text.