Integrated circuit devices including stacked elements and methods of forming the same
AssigneeSamsung Electronics Co., Ltd.
InventorsByounghak Hong, Jeonghyuk Yim, Inchan Hwang, Gilhwan Son, Seungyoung Lee, Saehan Park, Janggeun Lee, Myunghoon Jung, Seungchan Yun, Buhyun Ham, Kang-Ill Seo
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