Article storage equipment in semiconductor fabrication facility and logistics system including same

Article storage equipment in a semiconductor fabrication facility, the article storage equipment comprising:

• a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated;
• a purge unit configured to supply an inert gas into the transport container;
• a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container;
• a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit;
• and
• a controller management unit connected to the control unit through wireless communication and configured to manage operation of the control unit-,
• wherein the power supply unit comprises:
• a current converter configured to induce a current from the power supply cable;
• and
• a power supply line attached to or embedded in structures of the rail and the storage unit so as not to interfere with the transport vehicle and configured to supply the current from the current converter to the control unit, and
• wherein the current converter comprises:
• a ring-shaped core member installed to surround the power supply cable and configured to form a magnetic field by a current flowing along the power supply cable;
• and
• a coil member wound around the ring-shaped core member and configured to induce a current by the magnetic field.

A logistics system of a semiconductor fabrication facility, the logistics system comprising:

• a rail installed on a ceiling of the semiconductor fabrication facility and configured to provide a travel path of a transport vehicle;
• a power supply cable installed along the rail and configured to supply power to the transport vehicle;
• and
• article storage equipment configured to store a transport container from the transport vehicle,
• wherein the article storage equipment comprises:
• a storage unit installed around the rail and configured to store the transport container in which a wafer is accommodated;
• a purge unit configured to supply an inert gas into the transport container;
• a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container;
• a power supply unit configured to supply a current induced from the power supply cable to the control unit;
• and
• a controller management unit connected to the control unit through wireless communication and configured to manage operation of the control unit,
• wherein the power supply unit comprises:
• a current converter configured to induce a current from the power supply cable;
• and
• a power supply line attached to or embedded in structures of the rail and the storage unit so as not to interfere with the transport vehicle and configured to supply the current from the current converter to the control unit, and
• wherein the current converter comprises:
• a ring-shaped core member installed to surround the power supply cable and configured to form a magnetic field by a current flowing along the power supply cable;
• and
• a coil member wound around the ring-shaped core member and configured to induce a current by the magnetic field.