Gate valve apparatus and semiconductor manufacturing apparatus
AssigneeTokyo Electron Limited
InventorMasahiro Dogome
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AssigneeTokyo Electron Limited
InventorMasahiro Dogome
Estimating the term…
A gate valve apparatus and a semiconductor manufacturing apparatus, in which a volume of a drive portion for driving a valve body is reduced, are provided. The gate valve apparatus includes a housing having an opening, a valve body configured to open and close the opening, and a drive portion configured to drive the valve body, in which the drive portion includes a first crankshaft including a first input shaft rotatably supported by a side wall of the housing and a first output shaft rotatably supported by the valve body, a second crankshaft including a second input shaft rotatably supported by the side wall of the housing and a second output shaft rotatably supported by the valve body, a rotation transmission portion configured to transmit rotation of the first input shaft to the second input shaft, and an actuator configured to rotate the first input shaft.
A gate valve apparatus comprising:
Dependencies are inferred from the claim text.