Surface treatment composition and method for producing wafer
AssigneeCentral Glass Company, Limited
InventorsYoshiharu Terui, Yuzo Okumura, Soichi Kumon
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Abstract
A surface treatment composition of the present invention is a surface treatment composition that are supplied as a vapor to a surface of a wafer having an uneven pattern on the surface and used to form a water-repellent protective film on the surface, the surface treatment composition containing a silylating agent and a solvent, in which the silylating agent contains a trialkylsilylamine, the solvent contains at least one or more selected from the group consisting of glycol ether acetate and glycol acetate, and a total content of the glycol ether acetate and the glycol acetate is 50% by mass or more in 100% by mass of a total amount of the solvent.
Claims19
A surface treatment composition that are supplied as a vapor to a surface of a wafer having an uneven pattern on the surface and used to form a water-repellent protective film on the surface, the surface treatment composition comprising:
- a silylating agent;
- and
- a solvent,
- wherein the silylating agent contains a trialkylsilylamine,
- the solvent contains at least one or more selected from the group consisting of glycol ether acetate and glycol acetate, and
- a total content of the glycol ether acetate and the glycol acetate is 50% by mass or more in 100% by mass of a total amount of the solvent.
A method for producing a wafer, comprising:
- a step of preparing a wafer having an uneven pattern on a surface;
- a step of cleaning the surface of the wafer by supplying a cleaning liquid;
- and
- a step of supplying a vapor of a surface treatment composition to the surface on which the cleaning liquid is held, changing, on the surface, a state of the vapor to a liquid to replace the cleaning liquid with the liquid, and forming a water-repellent protective film on at least a part of the surface,
- wherein the surface treatment composition
- contains a silylating agent and a solvent,
- the silylating agent contains a trialkylsilylamine,
- the solvent contains at least one or more selected from the group consisting of glycol ether acetate and glycol acetate, and
- a total content of the glycol ether acetate and the glycol acetate is 50% by mass or more in 100% by mass of a total amount of the solvent.
Dependencies are inferred from the claim text.