Structure and method for memory element to confine metal with spacer
AssigneeGlobalFoundries U.S. Inc.
InventorsRobert Viktor Seidel, Suk Hee Jang, Anastasia Voronova, Young Seon You
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AssigneeGlobalFoundries U.S. Inc.
InventorsRobert Viktor Seidel, Suk Hee Jang, Anastasia Voronova, Young Seon You
Estimating the term…
The disclosure provides a structure and method for a memory element to confine a metal (e.g., a remaining portion of a metallic residue) with a spacer. A structure according to the disclosure includes a memory element over a first portion of an insulator layer. A portion of the memory element includes a sidewall over the insulator layer. A spacer is adjacent the sidewall of the memory element and on the first portion of the insulator layer. A metal-dielectric layer is within an interface between the spacer and the sidewall or an interface between the spacer and the first portion of the insulator layer. The insulator layer includes a second portion adjacent the first portion, and the second portion does not include the memory element, the spacer, and the metal-dielectric layer thereon.
A structure comprising:
A method comprising:
A structure comprising:
Dependencies are inferred from the claim text.