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US 12,588,414 B2Granted
Hybrid structure for a surface acoustic wave device
AssigneeSoitec
InventorMarcel Broekaart
Life of this patent
Estimating the term…
Abstract
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.
Claims22
A hybrid structure for a surface acoustic wave device, comprising:
- a support substrate having a first coefficient of thermal expansion;
- and
- a useful piezoelectric layer disposed on the support substrate, the useful piezoelectric layer having a second coefficient of thermal expansion higher than the first coefficient of thermal expansion of the support substrate, the useful piezoelectric layer having a first face on a side of the useful piezoelectric layer opposite the support substrate and a second face on a side of the useful piezoelectric layer proximate the support substrate;
- and
- an area of nanocavities disposed within the hybrid structure and located generally along a plane oriented parallel to the second face of the useful piezoelectric layer.
2 more elements
A surface acoustic wave device, comprising:
- a support substrate having a first coefficient of thermal expansion;
- a useful piezoelectric layer disposed on the support substrate, the useful piezoelectric layer having a second coefficient of thermal expansion higher than the first coefficient of thermal expansion of the support substrate, the useful piezoelectric layer having a first face on a side of the useful piezoelectric layer opposite the support substrate and a second face on a side of the useful piezoelectric layer proximate the support substrate;
- an area of nanocavities disposed within the surface acoustic wave device and located generally along a plane oriented parallel to the second face of the useful piezoelectric layer;
- and
- electrodes on or in the useful piezoelectric layer, the electrodes and the useful piezoelectric layer configured to generate a surface acoustic wave signal having a wavelength between the electrodes during operation of the surface acoustic wave device;
- wherein the area of nanocavities has a functional thickness smaller than the wavelength of the surface acoustic wave signal.
3 more elements
Dependencies are inferred from the claim text.