Display device and method for manufacturing display device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kenichi Okazaki
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Abstract
A method for manufacturing a display device that can easily achieve higher resolution is provided. A display device having both high display quality and high resolution is provided. A first EL film is deposited over a first pixel electrode, a first sacrificial film is formed to cover the first EL film and a first electrode, and the first sacrificial film and the first EL film are etched, so that a first EL layer is formed over the first pixel electrode. Then, the first sacrificial film is removed to expose the first electrode. Furthermore, a common electrode is formed over the first EL layer and the first electrode. The first EL film is etched by dry etching, and the first sacrificial film is removed by wet etching.
Claims12
A method for manufacturing a display device, comprising:
- a first step of forming a first pixel electrode, a second pixel electrode, and a first electrode;
- a second step of depositing a first EL film over the first pixel electrode and the second pixel electrode;
- a third step of forming a first sacrificial film covering the first EL film and the first electrode;
- a fourth step of exposing the second pixel electrode by etching the first sacrificial film and the first EL film and forming a first EL layer over the first pixel electrode and a first sacrificial layer over the first EL layer and the first electrode;
- a fifth step of depositing a second EL film over the first pixel electrode and the second pixel electrode;
- a sixth step of forming a second sacrificial film covering the second EL film and the first electrode;
- a seventh step of forming a second EL layer over the second pixel electrode and a second sacrificial layer over the second EL layer by etching the second sacrificial film and the second EL film;
- an eighth step of exposing the first EL layer, the second EL layer, and the first electrode by removing the first sacrificial layer and the second sacrificial layer;
- a ninth step of forming a common layer over the first EL layer and the second EL layer;
- and
- a tenth step of forming a common electrode over and in contact with the common layer and the first electrode.
A display device comprising:
- a first light-emitting element, a second light-emitting element, a third light-emitting element, and a fourth light-emitting element,
- wherein the first light-emitting element comprises a first pixel electrode, a first EL layer, a common layer, and a common electrode,
- wherein the second light-emitting element comprises a second pixel electrode, a second EL layer, the common layer, and the common electrode,
- wherein the third light-emitting element comprises a third pixel electrode, the first EL layer, the common layer, and the common electrode,
- wherein the fourth light-emitting element comprises a fourth pixel electrode, the second EL layer, the common layer, and the common electrode,
- wherein an insulating layer is between the first pixel electrode and the third pixel electrode, between the second pixel electrode and the fourth pixel electrode, and between the first pixel electrode and the second pixel electrode,
- wherein the first light-emitting element and the second light-emitting element are arranged in a first direction,
- wherein the first light-emitting element and the third light-emitting element are arranged in a second direction intersecting the first direction,
- wherein the second light-emitting element and the fourth light-emitting element are arranged in the second direction intersecting the first direction, and
- wherein the common layer and the common electrode have a band shape extending in the first direction.
Dependencies are inferred from the claim text.