Systems and methods for pillar extension in termination areas of wide band gap super-junction power devices

A super-junction (SJ) device, comprising:

• an active area comprising:
• a first portion of the active area in a first epitaxial (epi) layer that forms a first SJ layer of the SJ device;
• and
• a second portion of the active area in a second epi layer disposed on the first SJ layer that forms a device layer of the SJ device, wherein the first and second epi layers extend in a first direction parallel to a plane, wherein the second portion of the active area is disposed over the first portion of the active area in a first overlapping area extending in the first direction,
• wherein the first portion of the active area of the first epi layer includes a first set of SJ pillars comprising a particular doping concentration of a first conductivity type and a second set of SJ pillars comprising the particular doping concentration of a second conductivity type;
• and
• a termination area around the active area, comprising:
• a first portion of the termination area of the first epi layer, wherein the first portion of the termination area ends at a first distance in the first direction away from the second portion of the active area, wherein the first portion of the termination area includes at least one SJ pillar comprising the particular doping concentration of the first conductivity type or the second conductivity type, wherein no SJ pillar in the first epi layer of the SJ device is located outside of the first portion of the termination area in the first direction;
• and
• a second portion of the termination area of the second epi layer comprises one or more implanted regions that form a junction termination of the SJ device, wherein the junction termination ends at a second distance in the first direction away from the second portion of the active area, wherein the second distance is greater than the first distance in the first direction, wherein the junction termination is disposed over the first portion of the termination area in a second overlapping area in the first direction.