Method and system for routing of electrical conductors over neutralized power FETS

A vertical fin-based field effect transistor (FinFET) device comprising:

• an array comprising a plurality of rows and columns of fins;
• a set of active FinFET cells included in the array, each active FinFET cell in the set of active FinFET cells including a fin having a fin length and a fin width measured laterally with respect to the fin length, a first fin tip disposed at a first end, a second fin tip disposed at a second end, and a central region disposed between the first fin tip and the second fin tip, wherein the central region is characterized by an electrical conductivity;
• a neutralized region disposed within the array and including a set of inactive fins;
• and
• an electrical conductor disposed over the neutralized region;
• wherein each active FinFET cell in the set of active FinFET cells comprises:
• a source contact electrically coupled to the central region of the fin;
• a plurality of gate contacts electrically coupled to the central region;
• and
• a drain contact electrically coupled to the central region;
• and
• wherein the set of inactive fins are characterized by a second electrical conductivity less than the electrical conductivity of the central region.

A vertical fin-based vertical field effect transistor (FinFET) device comprising:

• an array of FinFETs comprising a plurality of rows and columns of fins, each of the fins having a fin length and a fin width measured laterally with respect to the fin length, a first fin tip disposed at a first end, a second fin tip disposed at a second end, and a central region disposed between the first fin tip and the second fin tip, wherein a first portion of the central region is characterized by an electrical conductivity;
• a neutralized region disposed in a second portion of the central region of at least a set of fins in a row of the plurality of rows of fins, wherein the neutralized region is characterized by a second electrical conductivity less than the electrical conductivity of the central region;
• and
• an electrical conductor disposed over the neutralized region.