Integrated assemblies and methods forming integrated assemblies
AssigneeMicron Technology, Inc.
InventorChe-Chi Lee
Life of this patent
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Abstract
Some embodiments include an integrated assembly having a laterally-extending container-shaped first capacitor electrode, and having a laterally-extending container-shaped second capacitor electrode laterally offset from the first capacitor electrode. Capacitor dielectric material lines interior surfaces and exterior surfaces of the container-shaped first and second capacitor electrodes. A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends along the lined interior and exterior surfaces of the first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.
Claims19
An integrated assembly, comprising:
- a column of shared capacitor electrode material extending vertically through a stack of alternating first and second levels;
- the first levels being capacitor-containing levels and comprising paired laterally-extending capacitors;
- each set of the paired capacitors including a first capacitor and a second capacitor, with the second capacitor being substantially a mirror-image of the first capacitor along a plane which extends vertically through a center of the column of the shared electrode material;
- each laterally-extending capacitor comprising a first electrode and a second electrode, and in a vertical cross section, each first and second electrode comprises substantially the same vertical dimension;
- at least one of the first and second electrodes of the capacitors including container-shaped electrodes which are coupled with source/drain regions associated with access devices;
- the shared electrode material extending along inner and outer surfaces of the container-shaped electrodes, and being spaced from the inner and outer surfaces by capacitor dielectric material;
- the second levels being insulative levels comprising one or more insulative materials;
- and
- wherein at least one source/drain region of each laterally-extending capacitor comprises a concave shape.
An integrated assembly, comprising:
- a column of shared capacitor electrode material extending vertically through a stack of alternating first and second levels;
- the first levels being capacitor-containing levels and comprising paired laterally-extending capacitors;
- the laterally-extending capacitors each comprise electrodes coupled with source/drain regions associated with access devices;
- the second levels comprising at least two insulative levels of insulative material;
- and
- wherein each laterally-extending capacitor is coupled with source/drain regions associated with access devices;
- at least one source/drain region of each laterally-extending capacitor comprises a concave shape.
Dependencies are inferred from the claim text.