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US 12,587,164 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya Kimura, Kentaro Nakamura
Life of this patent
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Abstract
An acoustic wave device includes a scandium-containing aluminum nitride film and electrodes on at least one of first and second principal surfaces of the scandium-containing aluminum nitride film. The scandium-containing aluminum nitride film includes areas in which a crystal axis is deviated with respect to remaining portions of the scandium-containing aluminum nitride film.
Claims14
An acoustic wave device comprising:
- a scandium-containing aluminum nitride film;
- and
- an electrode provided on at least one principal surface of the scandium-containing aluminum nitride film;
- wherein
- the scandium-containing aluminum nitride film includes an area in which a crystal axis is deviated;
- and
- in the scandium-containing aluminum nitride film, areas in which the crystal axis is deviated by an absolute value of about 3° or more are present at a ratio that is equal to or greater than about 2% and equal to or less than about 5% of an entirety of the scandium-containing aluminum nitride film.
4 more elements
Dependencies are inferred from the claim text.