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US 12,587,160 B2Granted
Laterally excited bulk wave device with acoustic mirror
AssigneeSkyworks Solutions, Inc.
InventorRei Goto
Life of this patent
Estimating the term…
Abstract
A laterally excited bulk acoustic wave device is disclosed. The laterally excited bulk acoustic wave device can include a support substrate, a solid acoustic mirror on the support substrate, a piezoelectric layer on the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer. The interdigital transducer electrode is arranged to laterally excite a bulk acoustic wave.
Claims20
A laterally excited bulk acoustic wave device comprising:
- a support substrate;
- a solid acoustic mirror on the support substrate, the solid acoustic mirror including at least two low impedance layers, a first low impedance layer in contact with the support substrate having at least a first thickness and at least a high impedance layer having at least a second thickness with the first thickness thinner than the second thickness;
- a piezoelectric layer on the solid acoustic mirror, the piezoelectric layer having a thickness of 0.4 micrometers or less;
- and
- an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode arranged to laterally excite a bulk acoustic wave.
2 more elements
An acoustic wave filter comprising:
- a laterally excited bulk acoustic wave resonator including a solid acoustic mirror on a first substrate, the solid acoustic mirror including a least two low impedance layers, at least a first low impedance layer in contact with the substrate having at least a first thickness and at least a high impedance layer having at least a second thickness with the first thickness thinner than the second thickness, a piezoelectric layer on the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer, the piezoelectric layer having a thickness of 0.4 micrometers or less;
- and
- a plurality of acoustic wave resonators, the laterally excited bulk acoustic wave resonator and the plurality of acoustic wave resonators together configured to filter a radio frequency signal.
A radio frequency module comprising:
- an acoustic wave filter having a laterally excited bulk acoustic wave resonator and a plurality of acoustic wave resonators, the laterally excited bulk acoustic wave resonator including a solid acoustic mirror on a substrate, the solid acoustic mirror including at least two low impedance layers, a first low impedance layer in contact with the substrate having at least a first thickness and at least a high impedance layer having at least a second thickness with the first thickness thinner than the second thickness, a piezoelectric layer on the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer, the piezoelectric layer having a thickness of 0.4 micrometers or less;
- and
- a radio frequency circuit element coupled to the acoustic wave filter, the acoustic wave filter and the radio frequency circuit element being enclosed within a common package.
Dependencies are inferred from the claim text.