Multi-port cross flow system

A method of processing a substrate, comprising:

• introducing a gas into a first end of chamber body of a processing chamber;
• evacuating the gas through a port adapter system coupled to a second end of the chamber body, wherein the port adapter system comprises:
• a port adapter body defining a plurality of apertures in fluid communication with the processing chamber, wherein each of the plurality of apertures are spaced apart from each other along the port adapter body, such that a distance between adjacent apertures is within about 30% of an average aperture spacing distance;
• a plurality of independently controllable valves fluidly coupled to the plurality of apertures;
• and
• an exhaust system in fluid communication with a system foreline and the plurality of apertures;
• wherein each aperture of the plurality of apertures is fluidly coupled to the exhaust system along a corresponding flow path;
• a first aperture of the plurality of apertures has a first flow path to the exhaust system with a first flow path length that is longer than a flow path length of the other apertures of the plurality of apertures;
• and
• the first aperture defines a diameter that is larger than a diameter of the other apertures of the plurality of apertures;
• and
• closing a first valve of the plurality of valves while maintaining at least a second valve of the plurality of valves in an open configuration;
• and
• further removing the gas from the chamber body through the port adapter system.