Electrode fixing assembly and dry etching device
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorsZhiyuan Li, Xianfu Zeng
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Abstract
The present disclosure provides an electrode fixing assembly and a dry etching device. The electrode fixing assembly includes a first fixing element and a second fixing element, wherein a hardness of a material of the first fixing element is greater than a hardness of a material of the second fixing element. The electrode fixing assembly is configured to be arranged in the dry etching device to fix an upper electrode on a device body, a generation of particles is reduced or eliminated, and then problems such as poor etching or the like caused by a substrate to be etched covered by the particles are avoided.
Claims20
An electrode fixing assembly, comprising a first fixing element and a second fixing element, wherein a hardness of a material of the first fixing element is greater than a hardness of a material of the second fixing element, the first fixing element comprises a first transverse part and a first longitudinal part connected arranged crosswise with each other, and the second fixing element comprises a second transverse part and a second longitudinal part connected arranged crosswise with each other;
- and wherein the electrode fixing assembly is configured to be arranged in a dry etching device to fix an upper electrode on a device body, the first fixing element and the second fixing element are arranged between the upper electrode and the device body, a side of the first fixing element away from the second fixing element is arranged towards the device body, and a side of the second fixing element away from the first fixing element is arranged towards the upper electrode.
A dry etching device, comprising:
- a device body, having an inner cavity;
- an upper electrode, arranged in the inner cavity of the device body;
- an electrode fixing assembly, comprising a first fixing element and a second fixing element, wherein a hardness of a material of the first fixing element is greater than a hardness of a material of the second fixing element, the first fixing element comprises a first transverse part and a first longitudinal part connected arranged crosswise with each other, and the second fixing element comprises a second transverse part and a second longitudinal part connected arranged crosswise with each other;
- and
- wherein the electrode fixing assembly is configured to be arranged in the dry etching device to fix an upper electrode on a device body, the first fixing element and the second fixing element are arranged between the upper electrode and the device body, a side of the first fixing element away from the second fixing element is arranged towards the device body, and a side of the second fixing element away from the first fixing element is arranged towards the upper electrode;
- the electrode fixing assembly is arranged in the inner cavity of the device body;
- and
- a lower electrode, arranged in the inner cavity of the device body, the lower electrode is arranged opposite to the upper electrode.
Dependencies are inferred from the claim text.