Pulsed RF plasma generator with high dynamic range
AssigneeMKS Inc.
InventorsKy Luu, Jonathan Smyka, Aaron Radomski
Life of this patent
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Abstract
A RF power generator having a fixed power generation section. The fixed power generation section includes a first plurality of power amplifiers each configured to receive a supply voltage and to output a respective first voltage. The RF power generator also includes a weighted power generation section including a plurality of weighted power amplifier modules. Each weighted power amplifier module includes a weighted power amplifier and an associated transformer. Each weighted power amplifier of the weighted power amplifier module receives a respective weighted supply voltage. The voltage across the transformer of each weighted power amplifier module is a fraction of the first voltage.
Claims33
A RF power generator, comprising:
- a fixed power generation section including a first plurality of power amplifiers each configured to receive a supply voltage and to output a first voltage;
- and
- a weighted power generation section including a plurality of weighted power amplifier modules, each weighted power amplifier module including a weighted power amplifier and a transformer, wherein each weighted power amplifier of the plurality of weighted power amplifier modules receives a respective weighted supply voltage, and a voltage across the transformer of each weighted power amplifier module is a fraction of the first voltage.
A RF power generator, comprising:
- a fixed power generation section including a first plurality of power amplifiers each configured to receive a supply voltage and to output a first voltage;
- and
- a weighted power generation section including a plurality of weighted power amplifier modules, each weighted power amplifier module is configured to receive a respective weighted supply voltage, and a voltage across the output of each weighted power amplifier module is a fraction of the first voltage.
Dependencies are inferred from the claim text.