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US 12,586,758 B2Granted
Power delivery to a plasma via inductive coupling
AssigneeAdvanced Energy Industries, Inc.
InventorRandy Heckman
Life of this patent
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Abstract
A power delivery system comprising a voltage source, an amplifier coupled to a first node and the voltage source, the amplifier comprising a reactive network configured to form a resonant circuit when the first node is coupled to a coil. The power delivery system also comprises an impedance coupled to a second node and a controller configured to control power to the first node by varying the voltage source and control power to the second node by adjusting the impedance.
Claims20
A power delivery system, comprising:
- a voltage source;
- an amplifier coupled to a first node and the voltage source, the amplifier comprising a reactive network configured to form a resonant circuit when the first node is coupled to a coil;
- an impedance coupled to a second node;
- a controller configured to:
- control power to the first node by varying the voltage source;
- and
- control power to the second node by adjusting the impedance.
4 more elements
A method for power delivery comprising:
- creating a resonant circuit by coupling an amplifier to first coil;
- inductively coupling power from the first coil to a second coil;
- controlling power to the first coil by adjusting a voltage applied to the amplifier;
- and
- controlling the power inductively coupled to the second coil by adjusting an impedance that is coupled to the second coil.
2 more elements
A power delivery system comprising:
- a first branch comprising a first voltage source and a first amplifier;
- a second branch comprising a second voltage source and a second amplifier;
- and
- at least one controller configured to:
- maintain a different frequency for the first amplifier than a frequency of the second amplifier;
- control power of the first amplifier by varying the first voltage source;
- and
- control power of the second amplifier by varying the second voltage source.
5 more elements
Dependencies are inferred from the claim text.