Image enhancement based on charge accumulation reduction in charged-particle beam inspection
AssigneeASML Netherlands B.V.
InventorsXiang Wang, Steffen Meyer, Mark O'Mahony
Life of this patent
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Abstract
An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a plurality of test images of a sample that are obtained at different landing energies, determining distortion levels for the plurality of test images, determining a landing energy level that enables the sample to be in a neutral charge condition during inspection based on the distortion levels, and acquiring an inspection image based on the determined landing energy level.
Claims20
A method for enhancing an inspection image in a charged-particle beam inspection system, the method comprising:
- acquiring a plurality of test images of a sample that are obtained at different landing energies;
- analyzing the acquired plurality of test images, wherein the analyzing comprises:
- determining distortion levels for the plurality of test images, wherein a distortion amount for each test image of the plurality of test images is determined;
- and
- comparing among the determined distortion amounts of the plurality of test images;
- determining a landing energy level that enables the sample to be in a neutral charge condition during inspection based on the distortion levels;
- and
- acquiring an inspection image based on the determined landing energy level.
An image enhancing apparatus comprising:
- a memory storing a set of instructions;
- and
- at least one processor configured to execute the set of instructions to cause the image enhancing apparatus to perform:
- acquiring a plurality of test images of a sample that are obtained at different landing energies;
- analyzing the acquired plurality of test images, wherein the analyzing comprises:
- determining distortion levels for the plurality of test images, wherein a distortion amount for each test image of the plurality of test images is determined;
- and
- comparing among the determined distortion amounts of the plurality of test images;
- determining a landing energy level that enables the sample to be in a neutral charge condition during inspection based on the distortion levels;
- and
- acquiring an inspection image based on the determined landing energy level.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to perform a method for enhancing an image, the method comprising:
- acquiring a plurality of test images of a sample that are obtained at different landing energies;
- analyzing the acquired plurality of test images, wherein the analyzing comprises:
- determining distortion levels for the plurality of test images, wherein a distortion amount for each test image of the plurality of test images is determined;
- and
- comparing among the determined distortion amounts of the plurality of test images;
- determining a landing energy level that enables the sample to be in a neutral charge condition during inspection based on the distortion levels;
- and
- acquiring an inspection image based on the determined landing energy level.
Dependencies are inferred from the claim text.