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US 12,586,751 B2Granted
Transfer device and analysis system
AssigneeHitachi High-Tech Corporation
InventorsNaofumi Kobayashi, Kenichi Nishinaka, Tsunenori Nomaguchi
Life of this patent
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Abstract
Provided is a technique capable of shortening observation throughput of a sample. A transfer device 2 includes a holder 24 configured to hold a mesh MS on which a sample to be analyzed using a charged particle beam device 3 is mounted, a position information acquisition function configured to acquire first information about a positional relationship between the mesh MS and the holder 24, and a position information output function configured to output the first information to the charged particle beam device 3.
Claims15
A transfer device comprising:
- a holder configured to hold a mesh on which a sample is mounted;
- a manipulator configured to fix the mesh to the holder via a mesh presser;
- and
- an integrated control unit configured to acquire first information about a positional shift of a reference area of the mesh relative to the holder due to fixing the mesh to the holder and output the first information to a charged particle beam device that is configured to analyze the sample.
1 more element
An analysis system comprising:
- a transfer device configured to transfer a mesh that has a reference area and on which a sample is mounted;
- and
- a charged particle beam device configured to analyze the sample, wherein
- the transfer device includes
- a holder configured to hold the mesh;
- a manipulator configured to fix the mesh to the holder via a mesh presser, and
- an integrated control unit configured to acquire first information about a positional shift of the reference area relative to the holder due to fixing the mesh to the holder,
- the charged particle beam device includes
- an electron gun configured to irradiate the sample with an electron beam,
- a stage used for fixing the holder, and
- a stage control unit electrically connected to the integrated control unit and configured to control the stage,
- the transfer device is configured to transfer the holder to the charged particle beam device;
- the integrated control unit is configured to output the first information to the stage control unit;
- the stage control unit is configured to set coordinates of the stage based on the first information;
- and
- the electron gun is configured to irradiate the sample with the electron beam.
13 more elements
Dependencies are inferred from the claim text.