US 12,586,750 B2 · Charged particle beam system and control method therefor

Abstract

Provided is a charged particle beam system capable of scanning a sample in a short time. The charged particle beam system is operative to scan the sample with a charged particle beam and to obtain a scanned image, and includes a magnetic deflector for producing a magnetic field to deflect the beam, an electrostatic deflector for producing an electric field to deflect the beam, and a controller for controlling both magnetic deflector and electrostatic deflector. The controller causes the magnetic deflector to deflect the beam in a first direction and to draw a first scan line, causes the magnetic deflector to deflect the beam in a second direction perpendicular to the first direction, causes the electrostatic deflector to deflect the beam in a third direction opposite to the first direction, and causes the magnetic deflector to deflect the beam in the first direction and to draw a second scan line.

Claims10

Dependent claims

A charged particle beam system for scanning a sample with a charged particle beam and obtaining a scanned image, said charged particle beam system comprising:

a magnetic deflector for producing a magnetic field to deflect the charged particle beam;
an electrostatic deflector for producing an electric field to deflect the charged particle beam;
and
a controller for controlling the magnetic deflector and the electrostatic deflector;
wherein said controller is configured to:
cause the magnetic deflector to deflect the charged particle beam in a first direction and to draw a first scan line,
cause the magnetic deflector to deflect the charged particle beam in a second direction perpendicular to the first direction after the first scan line has been drawn,
cause the electrostatic deflector to deflect the charged particle beam in a third direction opposite to the first direction after the first scan line has been drawn, and
cause the magnetic deflector to deflect the charged particle beam in the first direction and to draw a second scan line after the charged particle beam has been deflected in the second direction and in the third direction.

6 more elements

A control method for a charged particle beam system comprising a magnetic deflector for producing a magnetic field to deflect a charged particle beam and an electrostatic deflector for producing an electric field to deflect the charged particle beam, the charged particle beam system operating to scan a sample with the charged particle beam and to obtain a scanned image, said control method comprising the steps of:

causing the magnetic deflector to deflect the charged particle beam in a first direction and to draw a first scan line;
causing the magnetic deflector to deflect the charged particle beam in a second direction perpendicular to the first direction after the first scan line has been drawn;
causing the electrostatic deflector to deflect the charged particle beam in a third direction opposite to the first direction after the first scan line has been drawn;
and
causing the magnetic deflector to deflect the charged particle beam in the first direction and to draw a second scan line after the charged particle beam has been deflected in the second direction and the third direction.

2 more elements

Dependencies are inferred from the claim text.

Charged particle beam system and control method therefor

Life of this patent

Charged particle beam system and control method therefor

Life of this patent

Abstract

Claims10