Display device, display method, and storage medium

A display device for displaying, on a display screen, information about a predetermined substrate processing executed in a substrate processing apparatus that includes processing units including a liquid processing unit, a heat treatment unit, and an inspection unit to execute the predetermined substrate processing on a plurality of substrates, the display device comprising:

• a display control part configured to, in response to a first instruction from a user, allow the display screen to display a first image based on first capturing data obtained previously by capturing an image of a display target substrate among the plurality of substrates in the processing units, and configured to, in response to a second instruction from the user, allow the display screen to display a second image based on second capturing data obtained previously by capturing an image of the display target substrate in the processing units,
• wherein the first capturing data is data obtained by capturing the image of the display target substrate at a different timing from the second capturing data, or data obtained by capturing the image of the display target substrate in a different capturing region from the second capturing data,
• wherein the first capturing data is still image data obtained by capturing an image of an entirety of a front surface of the display target substrate after the predetermined substrate processing,
• wherein the second capturing data is still image data obtained by capturing an image of a peripheral edge region of the front surface of the display target substrate after the predetermined substrate processing,
• wherein the display control part is configured to allow the display screen to simultaneously display a first still image based on the first capturing data and a second still image based on the second capturing data,
• wherein the display control part is configured to, based on the second capturing data, allow the display screen to display the second still image so that a circumferential direction position of the display target substrate is indicated on a horizontal axis and a radial direction position of the display target substrate is indicated on a vertical axis, and
• wherein the display control part is configured to superimpose an image indicating an expected cutting position of the display target substrate on the first still image.