Shape-data acquisition apparatus

A shape-data acquisition apparatus for obtaining shape data of a work surface of an object to be inspected, the shape-data acquisition apparatus comprising:

• an illuminator including light-emitting portions and non-light-emitting portions alternately arranged at equal widths along a first direction, wherein a distance between each light-emitting portion is f1, and the light-emitting portions irradiate the work surface with illumination light at an incident angle to the work surface;
• a transmissive optical element facing specular reflected light of the illumination light reflected by the work surface, the transmissive optical element including opening portions and non-opening portions alternately arranged at equal widths along a second direction, wherein the opening portions transmit the specular reflected light, and a distance between each opening portion is f2;
• and
• an imager at a position to receive the specular reflected light transmitted through the transmissive optical element to capture the work surface, wherein
• the first direction and the second direction, when folded at a mirror image position on the work surface, are parallel to each other, and
• a relation of b=a×f2/f1 is satisfied, where a is a distance between the illuminator and the work surface in an optical-axis direction, and b is a distance between the work surface and the transmissive optical element in the optical-axis direction.