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US 12,585,232 B2Granted
Substrate support characterization to build a digital twin
AssigneeApplied Materials, Inc.
InventorsVivek Bharat Shah, Chunlei Zhang, Anders Andelman Nottrott
Life of this patent
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Abstract
A method includes receiving data indicative of properties of a substrate support from one or more sensors of a removable sensor assembly disposed proximate to the substrate support. The method further includes providing data based on the data indicative of properties of a substrate support to a physics-based model of the substrate support. The method further includes receiving predicted performance data of the substrate support from the physics-based model.
Claims14
A method, comprising:
- receiving, from one or more sensors of a removable sensor assembly comprising a capacitive displacement sensor disposed proximate to a substrate support, first data indicative of properties of the substrate support, the first data comprising capacitive displacement sensor data;
- determining a depth of one or more electrodes beneath a surface of the substrate support based on the first data that comprises the capacitive displacement sensor data;
- providing the depth of the one or more electrodes to a model of the substrate support;
- receiving, from the model, predicted performance data of the substrate support based on the depth of the one or more electrodes;
- obtaining measured performance data of the substrate support;
- and
- performing a corrective action in view of one or more differences between the measured performance data and the predicted performance data.
4 more elements
A method, comprising:
- obtaining capacitive displacement sensor data of a substrate support;
- determining a depth of one or more electrodes beneath a surface of the substrate support based on the capacitive displacement sensor data;
- providing data indicative of the depth of one or more electrodes to a model of the substrate support;
- receiving, from the model of the substrate support, predicted performance data of the substrate support based on the provided data;
- determining, in view of the predicted performance data, predicted properties of a substrate to be processed using the substrate support;
- obtaining measured properties of the substrate processed using the substrate support;
- and
- causing performance of a corrective action based on the predicted properties of the substrate, the measured properties of the substrate, and one or more differences between the predicted properties of the substrate and the measured properties of the substrate.
5 more elements
Dependencies are inferred from the claim text.