Determining apparatus, pattern forming apparatus, and method for manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsTakahiro Yamamoto, Mitsuru Inose
Life of this patent
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Abstract
In order to provide a determining apparatus capable of determining whether there is a foreign substance on a substrate stage with suppressing a decrease in productivity of an apparatus, the determining apparatus according to the present invention is configured to determine a state of a surface of each of a first substrate stage and a second substrate stage based on a first detection result of a substrate surface of a substrate mounted on the first substrate stage and a second detection result of the substrate surface of the substrate mounted on the second substrate stage.
Claims19
A determining apparatus comprising:
- a controller configured to:
- obtain a first detection result which is a result of detecting a surface of a first substrate when the first substrate is placed on a first substrate stage;
- obtain a second detection result which is a result of detecting the surface of the first substrate when the first substrate is placed on a second substrate stage;
- and
- determine an abnormality of respective surfaces of the first substrate stage and the second substrate stage based on a comparison of the first detection result and the second detection result.
A determining method comprising:
- obtaining a first detection result which is a result of detecting a surface of a first substrate when the first substrate is placed on a first substrate stage;
- obtaining a second detection result which is a result of detecting the surface of the first substrate when the first substrate is placed on a second substrate stage;
- and
- determining an abnormality of respective surfaces of the first substrate stage and the second substrate stage based on a comparison of the first detection result and the second detection result.
A non-transitory computer-readable storage medium storing a program for causing a computer to determine a state of a surface of each of a first substrate stage and a second substrate stage, the program causing the computer to execute:
- obtaining a first detection result which is a result of detecting a surface of a first substrate when the first substrate is placed on a first substrate stage;
- obtaining a second detection result which is a result of detecting the surface of the first substrate when the first substrate is placed on a second substrate stage;
- and
- determining an abnormality of respective surfaces of the first substrate stage and the second substrate stage based on a comparison of the first detection result and the second detection result.
Dependencies are inferred from the claim text.